Lắp ráp thiết bị MEMS

Hệ thống cơ điện tử nhu cầu SMT chuyên dụng. Hàn ứng suất thấp (<1GPa) protects delicate structures. Cleanroom requirements: ISO Class 5 environment. Hermetic sealing with glass frit bonding. RF shielding using cavity packages. Testing: Resonance frequency analysis ±0.1%. Applications: Gyroscopes, pressure sensors. Yield optimization through vibration-isolated placement.